E5260A 半導體器件主要特性與技術(shù)指標
General Features
Perform precision dc parametric measurements
Eight slots for plug-in modules
Code compatible with 4142B
Measurement Capabilities
0.5 microvolt and 0.1 femtoamp measurement resolution (HRSMU + ASU)
+/- 100 Volts and +/- 100 milliamp output capability (MPSMU, HRSMU)
+/- 200 Volts and +/- 1 Amp output capability (HPSMU)
4 Amp ground unit